Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Implantation profile control with surface sputtering

Implantation profile control with surface sputtering

US Patent 5080730 · Granted Jan 14, 1992

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Broad range ion implanter1999
Simox materials through energy variation1993
Particle implantation apparatus and method1986
Method and apparatus for controlling article temperature during treatment in vac1985