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Home › Positive-working photoresist process employing a selected mixture of ethyl lactate and ethyl 3-ethoxy propionate as casting solvent during photoresist coating

Positive-working photoresist process employing a selected mixture of ethyl lactate and ethyl 3-ethoxy propionate as casting solvent during photoresist coating

US Patent 5063138 · Granted Nov 5, 1991

Estimated economic value: $1,794,000 ⓘ

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