Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Compact excimer laser

Compact excimer laser

US Patent 5048041 · Granted Sep 10, 1991

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

EUV light source with subsystem(s) for maintaining LPP drive laser output during2021
Extreme ultraviolet light source2020
EUV light source with subsystem(s) for maintaining LPP drive laser output during2016
Adaptive laser system for an extreme ultraviolet light source2016
Regenerative ring resonator2016
Extreme ultraviolet light source2016
High power seed/amplifier laser system with beam shaping intermediate the seed a2015
Master oscillator—power amplifier drive laser with pre-pulse for EUV light sourc2015
System and method for protecting a seed laser in an EUV light source with a Brag2014
Multi-pass optical apparatus2014
System and method for seed laser mode stabilization2014
Systems and methods for implementing an interaction between a laser shaped as li2014