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Home › M.sub.1-x N.sub.x TiAs.sub.1-a P.sub.a O.sub.5 waveguides grown by liquid phase epitaxy and process of making same

M.sub.1-x N.sub.x TiAs.sub.1-a P.sub.a O.sub.5 waveguides grown by liquid phase epitaxy and process of making same

US Patent 5039187 · Granted Aug 13, 1991

Estimated economic value: $14,291,000 ⓘ

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