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Home › Process and apparatus for producing epitaxial and/or highly textured grown film, free of foreign phases, of a high-T.sub.c -oxide superconductor on a substrate

Process and apparatus for producing epitaxial and/or highly textured grown film, free of foreign phases, of a high-T.sub.c -oxide superconductor on a substrate

US Patent 5028584 · Granted Jul 2, 1991

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