Process for forming a self-aligned FET having a T-shaped gate structure

Assignee

• Korea Electronics & Telecommunications Research Institute

Inventors

• Kyunhwan Sim (1 patents)
• Yungkyu Choi (1 patents)
• Chunuk Yang (1 patents)
• Chinhee Lee (2 patents)
• Chinyung Kang (1 patents)

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