Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Gas partial pressure sensor for vacuum chamber

Gas partial pressure sensor for vacuum chamber

US Patent 4988871 · Granted Jan 29, 1991

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Combined crystal retainer and contact system for deposition monitor sensors2016
High capacity monitor crystal exchanger utilizing an organized 3-D storage struc2015
Portable light emitting sampling probe2012
Acoustic consumption monitor2002
Acoustic tool for analysis of a gaseous substance1996
Multiple crystal head for deposition thickness monitor1991
Wavelength specific detection system for measuring the partial pressure of a gas1987
Deposition monitor and control system1983