Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Monolithic silicon membrane device fabrication process

Monolithic silicon membrane device fabrication process

US Patent 4978421 · Granted Dec 18, 1990

Estimated economic value: $16,946,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Multi-terminal cross-point synaptic device using nanocrystal dot structures2021
Semiconductor structures with deep trench capacitor and methods of manufacture2021
Semiconductor structures with deep trench capacitor and methods of manufacture2021
Semiconductor structures with deep trench capacitor and methods of manufacture2021
III-V extension by high temperature plasma doping2021
Self-forming spacers using oxidation2020
Lateral bipolar junction transistor with abrupt junction and compound buried oxi2020
Formation of FinFET junction2020
Self-forming spacers using oxidation2020
Semiconductor structures including an integrated FinFET with deep trench capacit2020
Lateral bipolar junction transistor with abrupt junction and compound buried oxi2019
Self-aligned trench metal-alloying for III-V nFETs2019