Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Automatic frequency follow-up in particle beam metrology upon employment of a modulated primary beam

Automatic frequency follow-up in particle beam metrology upon employment of a modulated primary beam

US Patent 4972142 · Granted Nov 20, 1990

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method and device for finding a parked vehicle2003
"Process and system for measuring the temporal course of a periodic signal havin1995
Process and system for measuring the course of a signal at a point of measuremen1994
Process and system for rapid analysis of the spectrum of a signal at one or seve1993
Process and system for the asynchronous measurement of signal courses1993
Method and apparatus for phase measurement of signals at a measuring point by an1990
Voltage measurement with an electron probe without external trigger signal1990
Method and arrangement for recording periodic signals with a laser probe1990
Method and apparatus for operating a scanning microscope1990
Method and apparatus for detecting and imaging measuring points that have a defi1989
Method and apparatus for detecting and imaging a voltage signal of at least one 1989
Measurement processing arrangement1989