Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Process for precise processing of workpiece using free radicals

Process for precise processing of workpiece using free radicals

US Patent 4960495 · Granted Oct 2, 1990

Assignee

No assignee recorded.

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method for manufacturing solid oxide and device therefor2022
Flattening method and flattening apparatus2021
Planarizing processing method and planarizing processing device2020
Flattening method and flattening apparatus2019
Planarizing processing method and planarizing processing device2019
Method for processing wide-bandgap semiconductor substrate and apparatus therefo2018
Reflective surface shape controllable mirror device, and method for manufacturin2016
Polishing method, polishing apparatus and GaN wafer2016
Panel device2015
Polishing method, polishing apparatus and polishing tool2014
EL emitting touch switch2014
Method of cleaning substrate2014