Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Electron lithography mask manufacture

Electron lithography mask manufacture

US Patent 4652762 · Granted Mar 24, 1987

Estimated economic value: $609,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Multi-spoke geodesic hub2011
Geodesic hub2009
Method for depositing particulate material into a pad of fibrous material in a f1991
Powder spray gun1991
Electron image projector1990
Apparatus for depositing particulate material into a pad of fibrous material in 1990
Electron image projector1987
Electron lithography apparatus1987
Electrostatic chuck1987
Electron lithography apparatus1987
Electron lithography mask manufacture1986
Electrostatic chuck1985