Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Optical lithographic system having a dynamic coherent optical system

Optical lithographic system having a dynamic coherent optical system

US Patent 4498009 · Granted Feb 5, 1985

Estimated economic value: $5,883,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method and apparatus for removing phase aberrations in windows using broadband p1990
Optical filter for incoherent imaging systems1989
Fiber optic condenser for an optical imaging system1985
High sensitivity focal sensor for electron beam and high resolution optical lith1985
Focal sensor having optical low pass filter1984
Optical lithographic system1984