Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method and device for attaching disc-or plate-shaped target bodies to cooling plates for sputtering systems

Method and device for attaching disc-or plate-shaped target bodies to cooling plates for sputtering systems

US Patent 4476151 · Granted Oct 9, 1984

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Sensor element device for a capacitive touch switch of an operating device, oper2017
Ceramic burner head1985
Decorative flatware handles and process for their preparation1985
Method for attaching disc- or plate-shaped targets to cooling plates for sputter1982
Refractory articles and composite metal-ceramic articles (cermets) prepared from1981