Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Lock and elevator arrangement for loading workpieces into the work chamber of an electron beam lithography system

Lock and elevator arrangement for loading workpieces into the work chamber of an electron beam lithography system

US Patent 4278380 · Granted Jul 14, 1981

Estimated economic value: $1,013,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Vacuum packed microwaveable lobster package and process1999
Microwaveable vacuum packed seafood package and process1999
Bacon wrapped seafood package and process1998
Flat pack vacuum packed seafood package and process for producing microwaveable 1998
Flat pack vacuum packed seafood package and process1998
Localized vacuum apparatus and method1992
Right angle driving1988
Mask holding1987
Module positioning apparatus1987
Evacuable chamber enclosing1987
X-Y Work table1981