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Home › Measuring device and method for measuring parameters of a piezoelectric crystal onto which a thin film of material is deposited as well as thin-film deposition systems with such a device and a method for controlling such systems

Measuring device and method for measuring parameters of a piezoelectric crystal onto which a thin film of material is deposited as well as thin-film deposition systems with such a device and a method for controlling such systems

US Patent 12493016 · Granted Dec 9, 2025

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