Method for generating an RF signal, controller, RF generator and plasma apparatus

Assignee

No assignee recorded.

Inventors

• Andre Grede (24 patents)
• Daniel Gruner (24 patents)
• Anton Labanc (22 patents)
• Roland Schlierf (7 patents)
• Nikolai Schwerg (6 patents)
• Manuel vor dem Brocke (8 patents)

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