Uniform gate width for nanostructure devices

Assignee

No assignee recorded.

Inventors

• Jui-Chien Huang (35 patents)
• Shih-Chou Chen (26 patents)
• Unknown
• Unknown
• Unknown
• Jung-Hao Chang (30 patents)
• Lo-Heng Chang (48 patents)
• Shun-Yuan Ju (13 patents)
• Guangwu Chen (16 patents)

View full patent text on Google Patents →