Diagnostic tool to tool matching methods for manufacturing equipment

Assignee

• Applied Materials

Inventors

• Sejune Cheon (5 patents)
• Jeong Jin Hong (9 patents)
• Mikyung Shim (4 patents)
• Xiaoqun Zou (5 patents)
• Jinkyeong Lee (5 patents)
• Sang Hong Kim (5 patents)

View full patent text on Google Patents →