Inspection apparatus and inspection system

Assignee

• Kabushiki Kaisha Toshiba
• Toshiba Energy Systems & Solutions

Inventors

• Mitsunori Yuminamochi (1 patents)
• Akihiro Matsuzaki (34 patents)
• Masaoki Saito (1 patents)
• Hitoshi Katayama (23 patents)
• Fumio Sato (67 patents)
• Dai Nozaki (2 patents)

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