Method of manufacturing phase shift photo masks

Assignee

• TSMC

Inventors

• Chun-Chieh Tien (4 patents)
• Cheng-Hsuen Chiang (4 patents)
• Chih-Ming Chen (363 patents)
• Cheng-Ming Lin (71 patents)
• Yen-Wei Huang (5 patents)
• Hao-Ming Chang (62 patents)
• Kuo-Chin Lin (61 patents)
• Kuan-Shien Lee (5 patents)

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