Method and device for compensating surface error of holographic grating substrate

Assignee

• Changchun Institute Of Optics, Fine Mechanics And Physics, Chinese Academy Of Sciences

Inventors

• Heshig Bayan (1 patents)
• Shan Jiang (74 patents)
• Yubo Li (29 patents)
• Zhaowu Liu (7 patents)
• Wei Wang (63 patents)
• Wenhao Li (26 patents)
• Shuo Li (114 patents)
• Yanxiu Jiang (1 patents)

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