Method for controlling stress in a substrate during laser deposition

Assignee

• Lam Research

Inventors

• Kurt Hein Vergeer (1 patents)
• Jeroen Aaldert Heuver (5 patents)
• Willem Cornelis Lambert Hopman (5 patents)
• Kristiaan Hendrikus Aloysius Böhm (5 patents)
• Jan Matthijn Dekkers (9 patents)
• Jan Arnaud Janssens (8 patents)

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