Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Wafer chuck, method for producing the same, and exposure apparatus

Wafer chuck, method for producing the same, and exposure apparatus

US Patent 12400906 · Granted Aug 26, 2025

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Substrate holding board, manufacturing method of device, and exposure device2025
Wafer chuck, method for producing the same, and exposure apparatus2023
Methods for inducing orexin neurons and agent for treating narcolepsy or eating 2016
Method of producing optical element forming mold and optical element forming mol2016
Process of making diamond-metal ohmic junction semiconductor device2001
Process for producing diamond covered member1998
Method for forming diamond film1998
Mold for forming an optical element1997
Diamond electronic device and process for producing the same1997
Diamond crystal forming method1997
Diamond crystal and method for forming the same1996
Monocrystalline diamond semiconductor device and several electronic components e1996