Smart seals for monitoring and analysis of seal properties useful in semiconductor valves

Assignee

• Greene, Tweed Technologies
• University Of Rhode Island Board Of Trustees

Inventors

• Carmen J. Quartapella (2 patents)
• Mookkan Periyasamy (12 patents)
• Elizabeth Sassano (4 patents)
• Otto J. Gregory (35 patents)
• Godi Fischer (4 patents)
• Tao Wei (35 patents)
• Zakary Kinzel (2 patents)
• Noah A. Burke (3 patents)

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