Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Device for etching the periphery edge of a substrate and method for controlling etching thereof

Device for etching the periphery edge of a substrate and method for controlling etching thereof

US Patent 12396103 · Granted Aug 19, 2025

Assignee

No assignee recorded.

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Substrate treatment apparatus having bowl assembly2025
Substrate support assembly for substrate treatment apparatus2025
Device for etching the periphery edge of a substrate2025
Substrate support assembly for substrate treatment apparatus2024
Substrate treatment apparatus having exhaust structure2024
Device for etching the periphery edge of a substrate comprising substrate sensin2024
Substrate treatment apparatus having back nozzle assembly2024
Substrate treating apparatus comprising ultrasonic wave cleaning unit2024
Spin head, apparatus for treating substrate, and method for treating substrate2014
Substrate chucking member, substrate processing apparatus having the member, and2013
Spin head and method of chucking substrate using the same2013
Substrate supporting unit, and apparatus and method for polishing substrate usin2013