Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Substrate drying device and substrate drying method

Substrate drying device and substrate drying method

US Patent 12394639 · Granted Aug 19, 2025

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Substrate cleaning apparatus, polishing apparatus, buffing apparatus, substrate 2025
Cleaning module, substrate processing apparatus including cleaning module, and c2024
Washing device and washing method2023
Substrate cleaning method and substrate cleaning apparatus2023
Substrate cleaning apparatus, substrate cleaning method, substrate processing ap2023
Substrate cleaning device and substrate cleaning method2023
Roll-type processing member, pencil-type processing member, and substrate proces2023
Cover for swing member of substrate processing apparatus, swing member of substr2023
Jig for attaching and detaching cleaning member2022
Substrate cleaning member and substrate cleaning apparatus2022
Substrate cleaning tool, substrate cleaning apparatus, substrate processing appa2022
Storage container of scrubbing member and package of same2021