Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Sputter deposition apparatus and method

Sputter deposition apparatus and method

US Patent 12385123 · Granted Aug 12, 2025

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method and apparatus for sputter deposition of target material to a substrate2025
Method and apparatus for sputter deposition of target material to a substrate2025
Method and apparatus for sputter deposition of target material to a substrate2025
Method and apparatus for sputter deposition of target material to a substrate2025
Method of manufacturing solid state battery cathodes for use in batteries2025
Sputter deposition2025
Sputter deposition2025
Energy storage device2024
Energy storage device2024
Energy storage device2024
Stack for an energy storage device2024
Stack for an energy storage device2024