Semiconductor device and manufacturing method thereof

Assignee

• TSMC

Inventors

• Kuan-Kan Hu (7 patents)
• Jhih-Rong Huang (10 patents)
• Yi-Bo Liao (34 patents)
• Shuen-Shin Liang (54 patents)
• Min-Chiang Chuang (2 patents)
• Sung-Li Wang (109 patents)
• Wei-Yen Woon (18 patents)
• Szuya S. Liao (61 patents)

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