Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Vibration insensitive interferometry for measuring thickness and profile of multilayer thin-film

Vibration insensitive interferometry for measuring thickness and profile of multilayer thin-film

US Patent 12326402 · Granted Jun 10, 2025

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Calibration method for deflectometry method, for improving measurement accuracy2025
RF module for antenna and antenna apparatus comprising same2025
RF module for antenna, RF module assembly, and antenna apparatus including same2025
Device and method for measuring thickness and refractive index of multilayer thi2024
Refrigerator2023
System and method for 3D shape measurement of freeform surface based on high-spe2022
Apparatus and method for measuring the thickness and refractive index of multila2022
Granules comprising L-amino acid and method for preparing the same2022
System and method for compensating for non-linear response characteristic in pha2022
Apparatus and method for multilayer thin film thickness measurement using single2022
Methionine-metal chelate and manufacturing method thereof2021
Methionine-metal chelate and manufacturing method thereof2021