Silylcyclodisilazane compound and method for manufacturing silicon-containing thin film using the same

Assignee

• Dnf Co.

Inventors

• Se Jin JANG (25 patents)
• Sung-Gi Kim (76 patents)
• Jeong Joo PARK (20 patents)
• Tae Seok BYUN (4 patents)
• Yong Hee KWONE (4 patents)
• Yeong Hun Kim (3 patents)
• Haengdon Lim (1 patents)
• Sang Yong Jeon (13 patents)
• Sang Ick Lee (49 patents)

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