Subfab area installation apparatus

Assignee

• Ebara
• Ebara Refrigeration Equipment & Systems Co.

Inventors

• Motoshi Kohaku (2 patents)
• Yukihiro Fukusumi (10 patents)
• Nobutaka BANNAI (2 patents)
• Hiromasa Miyata (16 patents)
• Naoya Hanafusa (3 patents)
• Ken Taoka (6 patents)
• Kazutomo Miyazaki (11 patents)

View full patent text on Google Patents →