Hybrid droplet generator for extreme ultraviolet light sources in lithographic radiation systems

Assignee

• Asml Netherlands B.V.

Inventors

• Benjamin Andrew Sams (7 patents)
• Dietmar Uwe Herbert Trees (4 patents)
• Theodorus Wilhelmus Driessen (8 patents)
• Herman Harry Borggreve (1 patents)
• Brandon Michael Johnson (2 patents)
• Vikas Giridhar Telkar (2 patents)

View full patent text on Google Patents →