Substrate transfer device and substrate transfer method

Assignee

• Samsung

Inventors

• Young Wook Kim (61 patents)
• Sang Min Kim (148 patents)
• Ji Hun Kim (96 patents)
• Gi-Nam Park (5 patents)
• Chul-Jun Park (13 patents)
• Yong-Jun Ahn (8 patents)
• Youn Gon Oh (4 patents)
• Byung Kook Yoo (4 patents)
• Hyun Woo Lee (564 patents)
• Jeong Hun Lim (3 patents)

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