Particle detection sensor and particle detector

Assignee

• Sharp Semiconductor Innovation

Inventors

• Daiki NARUSE (3 patents)
• Toshiya Fujiyama (10 patents)
• Hirokazu Sasabe (3 patents)
• Yoshifumi Masuda (16 patents)
• Mitsutoshi Okami (5 patents)
• Noboru Takeuchi (40 patents)

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