Atomic layer etching method using ligand exchange reaction

Assignee

• Sk Hynix
• Merck

Inventors

• Jae Chul Lee (55 patents)
• Hyun Sik Noh (2 patents)
• Dong Kyun Lee (32 patents)
• Eun Ae Jung (13 patents)
• Kyoung-Mun Kim (2 patents)
• Jooyong Kim (6 patents)
• Younghun Byun (1 patents)
• Byeong-il YANG (14 patents)
• Changhyun Jin (3 patents)

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