Sputtering target, method for manufacturing sputtering target, and method for forming thin film

Assignee

• Semiconductor Energy Laboratory

Inventors

• Shunpei Yamazaki (6,629 patents)
• Tetsunori Maruyama (48 patents)
• Yuki Imoto (38 patents)
• Hitomi Sato (16 patents)
• Masahiro Watanabe (448 patents)
• Mitsuo Mashiyama (28 patents)
• Kenichi OKAZAKI (282 patents)
• Motoki NAKASHIMA (51 patents)
• Takashi Shimazu (93 patents)

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