Transversely-excited film bulk acoustic resonator with optimized electrode thickness, mark, and pitch

Assignee

• Murata Manufacturing Co.

Inventors

• Bryant Garcia (100 patents)
• Ventsislav Yantchev (120 patents)
• Patrick Turner (134 patents)
• Viktor Plesski (90 patents)
• Julius Koskela (47 patents)
• Soumya Yandrapalli (30 patents)
• Neal Fenzi (92 patents)
• Robert B. Hammond (80 patents)

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