Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Integrated control of a plasma processing system

Integrated control of a plasma processing system

US Patent 12230476 · Granted Feb 18, 2025

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Synchronization of plasma processing components2025
Two stage pin diode driver with energy recovery2025
Apparatus for producing a waveform2025
Method and apparatus for emulating a reactive source impedance of a generator2025
Input impedance networks with power recovery2025
Synchronization of bias supplies2024
Current clamp for parallel switches2024
Frequency tuning for modulated plasma systems2024
Bias supply with a single controlled switch2024
Input impedance networks with power recovery2024
Frequency tuning for modulated plasma systems2023
Series stack switch circuit with voltage clamping and power recovery2023