Apparatus and method for cleaning oxide film

Assignee

• Doosan Enerbility Co.
• Pukyong National University Industry-University Cooperation Foundation

Inventors

• Yoon Sang Lee (7 patents)
• Hyun Sang Kong (2 patents)
• Jae Yun Shin (1 patents)
• Sang-Myung Cho (2 patents)
• Hyo Jin Baek (3 patents)
• Chang-Ik Lee (3 patents)
• Hyeong Chang Ryu (1 patents)
• Kyeong Seob Lim (1 patents)

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