Semiconductor device having specified relative material concentration between In—Ga—Zn—O films

Assignee

• Semiconductor Energy Laboratory

Inventors

• Shunpei Yamazaki (6,629 patents)
• Junichi Koezuka (337 patents)
• Yasutaka NAKAZAWA (76 patents)
• Yukinori SHIMA (160 patents)
• Masami JINTYOU (168 patents)
• Masayuki Sakakura (297 patents)
• Motoki NAKASHIMA (51 patents)

View full patent text on Google Patents →