Transversely-excited film bulk acoustic resonator with multiple diaphragm thicknesses and fabrication method

Assignee

• Murata Manufacturing Co.

Inventors

• Chris O'Brien (23 patents)
• Andrew Kay (32 patents)
• Albert Cardona (20 patents)
• Ventsislav Yantchev (120 patents)
• Patrick Turner (134 patents)
• Robert B. Hammond (80 patents)
• Dylan J. Kelly (49 patents)

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