Method for forming a thin film resistor with improved thermal stability

Assignee

• United Microelectronics

Inventors

• Kuo-Chih Lai (45 patents)
• Chi-Mao Hsu (69 patents)
• Shih-Min Chou (21 patents)
• Nien-Ting Ho (39 patents)
• Wei-Ming Hsiao (10 patents)
• Li-Han Chen (34 patents)
• Szu-Yao Yu (4 patents)
• Hsin-Fu Huang (50 patents)

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