Cleaning chamber for metal oxide removal

Assignee

• TSMC

Inventors

• Yen-Liang Lin (106 patents)
• Chia-Wen Zhong (7 patents)
• Yao-Wen Chang (164 patents)
• Min-Chang Ching (9 patents)
• Kuo-Liang Lu (30 patents)
• Cheng-Yuan Tsai (249 patents)
• Ru-Liang Lee (72 patents)

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