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Home › Reflection-type optical encoder scale including a high reflection region and a low reflection region having a low reflection portion including a metallic chromium film, a chromium oxide film, and a chromium nitride film, and reflection-type optical encoder including same

Reflection-type optical encoder scale including a high reflection region and a low reflection region having a low reflection portion including a metallic chromium film, a chromium oxide film, and a chromium nitride film, and reflection-type optical encoder including same

US Patent 12188795 · Granted Jan 7, 2025

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