Substrate processing apparatus

Assignee

• Jusung Engineering Co.

Inventors

• Jae Wan Lee (7 patents)
• Yong Hyun Kim (146 patents)
• Yoon J. Kim (26 patents)
• Yun Hoe KIM (3 patents)
• Chang Kyun PARK (18 patents)
• Gu Hyun JUNG (3 patents)
• Ki Bum Kim (109 patents)
• Seung Youb SA (4 patents)
• Chul Joo HWANG (27 patents)

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