Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Temperature-controlled chemical delivery system and reactor system including same

Temperature-controlled chemical delivery system and reactor system including same

US Patent 12163225 · Granted Dec 10, 2024

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Semiconductor processing device2025
Showerhead assembly and components2025
Showerhead assembly and components2025
Showerhead assembly and components thereof2025
Substrate susceptor using edge purging2025
Refillable large volume solid precursor sublimation vessel2025
Showerhead assembly for distributing a gas within a reaction chamber2025
Heater assembly including cooling apparatus and method of using same2025
Heater assembly including cooling apparatus and method of using same2025
Heater assembly including cooling apparatus and method of using same2025
Bottom fed sublimation bed for high saturation efficiency in semiconductor appli2024
Channeled lift pin2024