Anti-stiction process for MEMS device

Assignee

• TSMC

Inventors

• Jui-Chun Weng (36 patents)
• Lavanya Sanagavarapu (11 patents)
• Ching-Hsiang Hu (16 patents)
• Wei-Ding Wu (20 patents)
• Shyh-Wei Cheng (21 patents)
• Ji-Hong Chiang (20 patents)
• Hsin-Yu Chen (154 patents)
• Hsi-Cheng Hsu (31 patents)

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