Imprinting apparatus including silicon master with a plurality of nanofeatures and an anti-stick layer having a cyclosiloxane and method of forming

Assignee

• Illumina
• Illumina Cambridge Limited

Inventors

• Alexandre Richez (23 patents)
• Andrew A. Brown (42 patents)
• Julia Morrison (5 patents)
• Wayne N. George (46 patents)
• Timothy J. Merkel (11 patents)
• Audrey Rose Zak (9 patents)

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