Method for controlling multi-mover direct drive transmission system and related device

Assignee

• Aac Microtech (Changzhou) Co.

Inventors

• Min Chen (25 patents)
• Xueyuan Zhu (10 patents)
• Shun Guo (49 patents)
• Lin Qian (10 patents)
• Weiling Shi (15 patents)
• Wanlun Wang (2 patents)

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