MEMS solenoid inductor and manufacturing method thereof

Assignee

• Beihang University

Inventors

• Tiantong Xu (4 patents)
• Zhi Tao (6 patents)
• Haiwang Li (3 patents)
• Jiamian SUN (3 patents)
• Hanxiao Wu (2 patents)
• Kaiyun Zhu (3 patents)
• Yanxin Zhai (3 patents)
• Xiaoda Cao (3 patents)
• Wenbin Wang (48 patents)
• Weidong Fang (7 patents)

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